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Structural characterization of epitaxial Bi2Sr2CuO6+δ thin films deposited on SrTiO3 substrates using inverted cylindrical magnetron sputtering

par Ye, Min ;Zhang, Yinzi;De Marneffe, Jean-François ;Delplancke, Marie-Paule ;Deltour, Robert
Référence Thin solid films, 377-378, page (597-601)
Publication Publié, 2000-12

Article révisé par les pairs

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Résumé :

High quality c-axis oriented epitaxial Bi2Sr2CuO6+δ thin films were deposited on 0° and 6° vicinal SrTiO3 (100) substrates using an inverted cylindrical magnetron sputtering method. Their structural properties, regarding the orientation, epitaxy, surface morphology, composition, and surface microstructure, were studied by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. The influences of the deposition parameters and substrate surface structure on the structural properties of these epitaxial Bi2Sr2CuO6+δ thin films are studied. A metal-insulator transition is observed with a variation of the Sr deficiency. It is demonstrated that films on 0° and 6° vicinal substrates grow in the two-dimensional and step-flow modes, respectively. Optimal deposition conditions were obtained leading to an extremely smooth film surface and high epitaxial quality.