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Pillar-Based High-Yield Heterogeneous Integration of Lithium Niobate and Gallium Phosphide Thin Films

par Vandekerckhove, Tom ;Vanackere, Tom ;De Witte, Jasper;Cuyvers, Stijn;Dos Reis, Luis Nuno ;Billet, Maximilien ;Roelkens, Gunther;Clemmen, Stéphane ;Kuyken, Bart
Référence conference on Laer and electro-optics, CLEO 2023 Technical Digest Series, CLEO: Science and Innovations 2023, Optica Publishing Group, page (STh4O.6)
Publication Publié, 2023-05-17

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Titre:	Pillar-Based High-Yield Heterogeneous Integration of Lithium Niobate and Gallium Phosphide Thin Films
Auteur:	Vandekerckhove, Tom; Vanackere, Tom; De Witte, Jasper; Cuyvers, Stijn; Dos Reis, Luis Nuno; Billet, Maximilien; Roelkens, Gunther; Clemmen, Stéphane; Kuyken, Bart
Informations sur la publication:	conference on Laer and electro-optics, CLEO 2023 Technical Digest Series, CLEO: Science and Innovations 2023, Optica Publishing Group, page (STh4O.6)
Statut de publication:	Publié, 2023-05-17
Sujet CREF:	Optique
Mots-clés:	Frequency modulation
	Lithium niobate
	Photonic integrated circuits
	Polymers
	Silicon nitride
	Thin films
Langue:	Français
Identificateurs:	info:doi/10.1364/CLEO_SI.2023.STh4O.6