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Laterally moving bistable MEMS DC switch for biomedical applications

par Receveur, RAM;Marxer, Cornel;Duport, Francois ;Woering, R;Larik, Vincent;de Rooij, N.F.
Référence Micro Electro Mechanical Systems, 17th IEEE International Conference on. (MEMS), page (854-856)
Publication Publié, 2004

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Résumé :

We have designed a bi-stable micro electro mechanical switch for an implantable lead electrode multiplexer application. It is easy to fabricate using only one mask. Applying an 18 V pulse to the actuators induces state changes. Total size of the structure is approximately 1.5 mm×1.5 mm. The contact resistance stays consistently below 30 Ohm for the first 40000 cycles.