Titre:
  • Effects of hydrogen addition in nitrogen atmospheric pressure plasma on its optical and electrical properties and silicon-based deposits compositions
Auteur:Debrabandere, Delphine; Vanden Eynde, Xavier; Reniers, François
Informations sur la publication:Journal of physics. Conference series (Online), 275, 012011
Statut de publication:Publié, 2011
Sujet CREF:Chimie
Note générale:SCOPUS: cp.j
Langue:Anglais
Identificateurs:urn:issn:1742-6596
info:doi/10.1088/1742-6596/275/1/012011
info:scp/79952745771