par Monteiro, Othon Rego;Delplancke, Marie-Paule 
Référence NATO science series. Series II, Mathematics, physics and chemistry, 88, page (197-203)
Publication Publié, 2002
Référence NATO science series. Series II, Mathematics, physics and chemistry, 88, page (197-203)
Publication Publié, 2002
Article révisé par les pairs
| Résumé : | The great interest in the use of diamond-like carbon (DLC) films as a coating material is justified by the superior wear resistance and hardness, chem. inertness, and very low friction coeffs. of these coatings. Vacuum arc deposition is well suited to prep. superhard films with high sp3/sp2 ratios. However, the high level of internal stresses originating during growth prevents the deposition of thick films, and their hardness makes it difficult for DLC layers to comply with substrate deformations. To overcome these limitations, different approaches are possible. Multilayer structures are one means to maintain the surface mech. properties of the DLC while relieving the internal stresses. Another possibility is to dope the DLC films to reduce the internal stress and to stabilize the desirable sp3 bonds to higher temps. At higher doses of dopants, the formation of nanocrystals is possible and the properties of the coatings change drastically. All these approaches were investigated on films prepd. by cathodic arc and a synthesis of the results is presented here. |
