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Optical properties of molybdenum in the ultraviolet and extreme ultraviolet by reflection electron energy loss spectroscopy

par Pauly, Nicolas ;Yubero, Francisco;Tougaard, Sven
Référence Applied optics, 59, 14, page (4527-4532)
Publication Publié, 2020-05-01

Article révisé par les pairs

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Résumé :

Optical properties of polycrystalline molybdenum are determined from ultraviolet up to extreme ultraviolet by reflection electron energy loss spectroscopy (REELS). Calculations are performed within the dielectric response theory by means of the quantitative analysis of electron energy losses at surfaces QUEELS-ε(k, ω)-REELS software [Surf. Interface Anal. 36, 824 (2004)] that allows the simulation of inelastic scattering cross sections, using a parametric energy loss function describing the optical response of the material. From this energy loss function, the real and imaginary parts of the dielectric function, the refractive index, and the extinction coefficient are deduced and compared with previously published results.