• Citer

CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities

par Hermans, A.;Daele, M.;Kieninger, C.;Dendooven, J.;Clemmen, Stéphane ;Detavernier, C.;Koos, C.;Baets, Roel G.
Référence 2017 Conference on Lasers and Electro-Optics (CLEO), page (1-2)
Publication Publié, 2017-05

Publication dans des actes

• Accès en ligne
• Détails
• Contenu
• Statistiques

Résumé :

We report on the atomic layer deposition of ZnO for interfacing with existing Si3N4 photonics which lacks 2nd-order nonlinear functionalities. We measure a χ(2) of 15 pm/V in line with a bulk ZnO crystal.