Titre:
  • CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities
Auteur:Hermans, A.; Daele, M.; Kieninger, C.; Dendooven, J.; Clemmen, Stéphane; Detavernier, C.; Koos, C.; Baets, Roel G.
Informations sur la publication:2017 Conference on Lasers and Electro-Optics (CLEO), page (1-2)
Statut de publication:Publié, 2017-05
Sujet CREF:Optique
Mots-clés:Substrates, Nonlinear optics, nonlinear optics, Optical waveguides, 2nd-order nonlinear functionalities, Aluminum oxide, atomic layer deposition, bulk ZnO crystal, CMOS-compatible ALD zinc oxide coating, coatings, II-VI semiconductor materials, II-VI semiconductors, on-chip second-order nonlinear optical functionalities, Optical harmonic generation, photonics, wide band gap semiconductors, zinc compounds, Zinc oxide, ZnO
Langue:Anglais