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Chemical mechanisms inducing a dc current measured in the flowing post-discharge of an RF He-O 2 plasma torch

par Dufour, Thierry ;Hubert, Julie ;Vandencasteele, Nicolas ;Reniers, François
Référence Plasma sources science & technology, 21, 4, 045013
Publication Publié, 2012-08

Article révisé par les pairs

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Résumé :

The post-discharge of an RF plasma torch supplied with helium and oxygen gases is characterized by mass spectrometry, optical emission spectroscopy and electrical measurements. We have proved the existence of a dc current in the post-discharge (1-20A), attributed to the Penning ionization of atmospheric nitrogen and oxygenated species. The mechanisms ruling this dc current are investigated through experiments in which we discuss the influence of the O 2 flow rate, the He flow rate and the distance separating the plasma torch from a material surface located downstream. © 2012 IOP Publishing Ltd.