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Enrichment in molybdenum carbides and nitrides during Ar+ bombardment

par Maoujoud, M.;Jardinier, Marcelle ;Bouillon, Florent
Référence Thin solid films, 230, 1, page (28-34)
Publication Publié, 1993-07

Article révisé par les pairs

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Résumé :

α-Mo2C, δ-MoN and MoO3 interstitial compounds, obtained by direct metal-gas interaction, were investigated by coupled Auger electron spectroscopy (AES) and ionic erosion with Ar+. It was found that, when the energy EAr+ varies from 3.5 to 1 keV, the relative AES signal hx(KL2, 3L2, 3)/hMo(M4, 5N2, 3N4, 5) (X ≡ C and N in the case of the MoC and MoN systems respectively) is attenuated. It indicates a preferential enrichment in molybdenum on the film surface at a low energy (less than 1.5 keV). The observed behaviour was interpreted in terms of preferential reimplantation and sputtering of C and N. The relative sensitivity coefficients of carbon, nitrogen and oxygen compared with molybdenum were also determined. © 1993.