par Veis, Pavel V.P.;Macko, Peter ;Jašík, Juraj
Référence Proceedings of SPIE - The International Society for Optical Engineering, 6609, 660905
Publication Publié, 2007
Article révisé par les pairs
Résumé : Survey of several experimental techniques applied for absolute density measurements of atoms and radicals in plasma is presented. It includes the Vacuum Ultraviolet Absorption Spectroscopy, Actinometry and Emission Spectroscopy, Laser Absorption Spectroscopy and highly sensitive Cavity Ring-Down Spectroscopy. Performances and operation procedures of these techniques are illustrated.