par Monteiro, Othon Rego;Delplancke, Marie-Paule 
;Brown, Ian G.;Ager, Joel W.
Référence Materials Research Society symposia proceedings, 438, page (599-604)
Publication Publié, 1997
;Brown, Ian G.;Ager, Joel W.Référence Materials Research Society symposia proceedings, 438, page (599-604)
Publication Publié, 1997
Article révisé par les pairs
| Résumé : | Diamond-like C films with mech. properties approaching those of diamond were consistently produced by cathodic vacuum arc based techniques. These films were successfully used in applications where enhanced hardness and wear resistance are required. Such DLC films have two major drawbacks that prevent their application in other area: a high level of internal stresses, which promotes failure by spallation of thick films; and the loss of mech. properties at temps. >300°. The authors describe the effect of doping elements on the room-temp. mech. properties and on the thermal stability of DLC films upon annealing in air. The effect of the presence of W and Ti was studied and compared to pure DLC. The films were produced by dual-source metal plasma immersion ion implantation and deposition with magnetic filtering to remove macro impurities from the plasma; dopant content was controlled by varying the relative pulse duration of the two plasma sources. Microstructural and chem. characterization of the films are presented. |
