Article révisé par les pairs
Résumé : Extremely smooth YBa2Cu3O7-δ thin films (Tc = 88 K and a Jc > 2 × 106 A cm-2 at 77 K) were deposited on annealed (100) MgO substrates. X-ray diffractions of these films reveal that they are c-axis oriented with a high quality of epitaxy. A flat surface free of outgrowths is observed by scanning electron microscopy. Atomic force microscopy study shows that the average surface roughness of these films is less than 1 nm. It is found that the surface steps, induced by the thermal annealing on MgO substrates are essential for the preparation of epitaxial YBa2Cu3O7-δ thin films with an extremely smooth surface. These steps are interpreted as the preferential nucleation and rapid growth sites which lead to a controlled growth and a smooth surface. © 1997 Elsevier Science Ltd.