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Nitrogen rich carbon nitride thin films deposited by hybrid PLD technique

par Jelinek, Miroslav;Kulisch, Wilhelm;Lancok, Ján;Popov, Cyril;Bulir, Jiri ;Delplancke, Marie-Paule
Référence Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals, 374, page (207-210)
Publication Publié, 2002

Article révisé par les pairs

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Résumé :

Highly nitrogenated CNx, films were created by pulsed laser deposition (PLD), combined with radiofrequency (RF) and hollow cathode (HC) discharges. The N/C ratio higher than 1 was measured. Deposition set- up and results of optical measurement are discussed.