par Preumont, André 
;Rodrigues, Gonçalo;Bastaits, Renaud ;Roosendaal, Sigrid;Stockman, Yvan ;Gebhardt, S.;Schoenecker, A.;Villon, Pierre F.
Référence Optical engineering, 48, 3, page (1-7), 034001
Publication Publié, 2009-03
;Rodrigues, Gonçalo;Bastaits, Renaud ;Roosendaal, Sigrid;Stockman, Yvan ;Gebhardt, S.;Schoenecker, A.;Villon, Pierre F.Référence Optical engineering, 48, 3, page (1-7), 034001
Publication Publié, 2009-03
Article révisé par les pairs
| Résumé : | This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom from silicon wafers with bimorph piezoelectric actuation. The mirror may be used on its own, or as a segment of a larger mirror. The typical size of one segment is 100to200mm; the production process relies on silicon wafers and thick film piezoelectric material deposition technology; it is able to lead to an actuation pitch of the order of 5mm, and the manufacturing costs appear to grow only slowly with the number of degrees of freedom in the adaptive optics. © 2009 Society of Photo-Optical Instrumentation Engineers. |
