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Energetics of reactions in a dielectric barrier discharge with argon carrier gas: VII anhydrides

par Mertens, Jeremy ;Watson, Sean;Nisol, Bernard ;Wertheimer, Michael Robert;Reniers, François
Référence Plasma processes and polymers, e1800186
Publication Publié, 2019-01-01

Article révisé par les pairs

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Résumé :

The method developed for fundamental understanding of energetic exchanges between monomer molecules and argon carrier gas in a dielectric barrier discharge (DBD) has previously proven merit. In this seventh article related to this methodology, research has been extended to a new family of precursors: anhydrides. Monomers (typically ‰) were mixed with 10 slm of Ar in a 20 kHz, 8 kV (peak-to-peak) DBD corresponding to an energy per cycle of 1600 μJ for pure Ar. For each of the investigated monomers E m , the energy absorbed per molecule was plotted as a function of precursor flow rate. The influence of chemical structure (C/O ratio, unsaturation) has been investigated and compared with previous data for other types of precursors. Thin plasma polymer coatings were deposited; in addition to measuring deposition rates, we also present relationships between E m values, spectro-ellipsometric and FTIR measurements.