par Mulay, Shantanu S.S.;Becker, Gauthier;Vayrette, Renaud;Raskin, Jean-Pierre;Pardoen, Thomas;Galceran Mestres, Montserrat ;Godet, Stéphane
Référence 2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013(14 April 2013 through 17 April 2013; Code 98040: Wroclaw; Poland), 2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
Publication Publié, 2013
Publication dans des actes
Titre:
  • The fracture studies of polycrystalline silicon based MEMS
Auteur:Mulay, Shantanu S.S.; Becker, Gauthier; Vayrette, Renaud; Raskin, Jean-Pierre; Pardoen, Thomas; Galceran Mestres, Montserrat; Godet, Stéphane
Informations sur la publication:2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013(14 April 2013 through 17 April 2013; Code 98040: Wroclaw; Poland), 2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
Statut de publication:Publié, 2013
Sujet CREF:Sciences de l'ingénieur
Note générale:SCOPUS: cp.c
Langue:Anglais
Identificateurs:urn:isbn:978-146736138-5
info:doi/10.1109/EuroSimE.2013.6529898
info:scp/84880986950