Résumé : In this thesis, we focused on the understanding of the synthesis and texturization processes of hydrophobic and (super)hydrophobic fluorinated surfaces by atmospheric plasmas.

First, we focused on the surface modifications of a model surface, the polytetrafluoroethylene (PTFE), by the post-discharge of a radio-frequency plasma torch. The post-discharge used for the surface treatment was characterized by optical emission spectroscopy (OES) and mass spectrometry (MS) as a function of the gap (torch-sample distance), and the helium and oxygen flow rates. Mechanisms explaining the production and the consumption of the identified species (N2, N2+, He, O, OH, O2m, O2+, Hem) were proposed.

The surface treatment was then investigated as a function of the kinematic parameters (from the motion robot connected to the plasma torch) and the gas flow rates. Although no change in the surface composition was recorded, oxygen is required to increase the hydrophobicity of the PTFE by increasing its roughness, while a pure helium plasma leads to a smoothing of the surface. Based on complementary experiments focused on mass losses, wettability and topography measurements coupled to the detection of fluorinated species on an aluminium foil by XPS, we highlighted an anisotropic etching oriented vertically in depth as a function of the number of scans (associated to the treatment time). Atomic oxygen is assumed to be the species responsible for the preferential etching of the amorphous phase leading to the rough surface, while the highly energetic helium metastables and/or VUV are supposed to induce the higher mass loss recorded in a pure helium plasma.

The second part of this thesis was dedicated to the deposition and the texturization of fluorinated coatings in the dielectric barrier discharge (DBD). The effects of the nature of the precursor (C6F12 and C6F14), the nature of the carrier gas (argon and helium), the plasma power, and the precursor flow rate were investigated in terms of chemical composition, wettability, topography and crystallinity by SIMS, XPS, WCA, AFM and XRD. We showed that hydrophobic surfaces with water contact angles (WCA) higher than 115° were obtained only in the presence of argon and were assumed to be due to the roughness created by the micro-discharges. Plasma-polymerized films in helium were smooth and no WCA higher than 115° was observed. We also studied the impact of the deposition rate and the layer thickness in the hydrophobic properties as well as the polymerization processes through the gas phase characterization.