par Lucas, Stéphane ;Chevallier, Jacques;Chechenin, Nicolai N.G.
Référence Surface & coatings technology, 66, 1 -3 pt 2, page (334-339)
Publication Publié, 1994-08
Article révisé par les pairs
Résumé : This paper is devoted to the study of the surface hardness of pure Al implanted with molecular nitrogen of energy 100 keV. The experiments reported here were designed with a specific problem in mind; that of searching for the perfect implantation dose and temperature combination which could produce the highest increase in hardness. Implantations carried out at low dose and temperature produce a high density of small AlN precipitates, while those carried out at high temperature produce large but few precipitates. Since the mechanical properties are directly related to the dispersion and the size of the AlN precipitates, we can control their effect by varying the implantation conditions. Samples were successively implanted with 14N and 15N at different doses (1-3 × 1017 at cm-2) and temperatures (30-400°C) for each species. Their depth profiles were measured with the resonant nuclear reaction 15N(p,αy)12C. The top surface of the sample was characterized by plane-view transmission electron microscopy and the mechanical properties were studied using a nanoindenter.