Direction d'ouvrage
| Titre: |
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| Auteur: | Lambert, Pierre; et al. |
| Informations sur la publication: | Springer, Ed. 1 |
| Statut de publication: | Publié, 2013-09-30 |
| series: | Microtechnology and MEMS |
| Sujet CREF: | Sciences de l'ingénieur |
| Volumes/pages: | 1 v. (326 p.) |
| Mots-clés: | bubble-actuated compliant table |
| axial capillary forces | |
| capillary adhesion | |
| capillary forces | |
| capillary micro motor | |
| capillary torque | |
| lateral capillary forces | |
| packaging of microdevices | |
| surface tension | |
| Langue: | Anglais |
| Identificateurs: | urn:isbn:978-3-642-37551-4 |
