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Note on the use of flat collectors in sputtering experiments

par Bonnijns, E.;Francken, Louis
Référence Physics letters. A, 24, 13, page (764-765)
Publication Publié, 1967-06

Article révisé par les pairs

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Résumé :

From the knowledge of the apparent ejection angle, deduced from a direct measurement on the flat collector, and from the angular distribution P(θ) of atoms around the ejection direction it is possible to determine the correct ejection angle of the atoms sputtered from single crystals. © 1967.