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Influences of thermal annealing and humidity exposure on surface structure of (100) single-crystal MgO substrate

par Delplancke, Marie-Paule ;Ye, Min ;Winand, René ;De Marneffe, Jean-François ;Deltour, Robert
Référence Journal of materials research, 14, 5, page (2133-2137)
Publication Publié, 1999-05

Article révisé par les pairs

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Résumé :

We studied the influence of thermal annealing on the surface structure of (100) single-crystal MgO substrates by atomic force microscopy (AFM). By annealing MgO substrates at various temperatures for 4 h in flowing oxygen, we showed that the surface reconstruction could be explained by considering surface diffusion, surface evaporation, and condensation. At an annealing temperature of 1473 K, a stepped structure was formed with screw dislocations acting as step sources. The influence of humidity on the surface morphology of MgO substrates was also studied by exposing them to a constant humidity of 40 and 80% for different times. After an exposure time of 1.5 h in 80% humidity, the substrate surface was already covered by reaction products. For the 40% humidity, the corresponding time is 10 h. The major reaction product was identified as Mg(OH)2 by x-ray diffraction.