Résumé : This paper introduces a novel production technique for the planar wire grid plates of microstrip gas chambers (MSGCs, gaseous particle detectors), taking advantage from the typical thin film metallization technologies. The aim of the work here presented has been to manufacture MSGC substrates which can meet the challenging requirements proper to particle tracking detectors in highly ionizing environments. These requirements are mainly represented by high reliability and robustness, since the devices are supposed to operate efficiently for at least 10 years in the extremely hostile conditions foreseen at the large hadron collider at CERN (CH). A detailed process description will be given and results will be analyzed both from the production point of view and from the application of the manufactured prototypes as detectors for high energy physics experiments.