par Jelinek, Miroslav;Kulisch, Wilhelm;Delplancke, Marie-Paule 
;Lancok, Ján;Jastrabík, L.;Chvostová, Dagmar;Popov, Cyril;Bulir, Jiri
Référence Applied physics. A, Materials science & processing, 73, 2, page (167-170)
Publication Publié, 2001
;Lancok, Ján;Jastrabík, L.;Chvostová, Dagmar;Popov, Cyril;Bulir, Jiri Référence Applied physics. A, Materials science & processing, 73, 2, page (167-170)
Publication Publié, 2001
Article révisé par les pairs
| Résumé : | Nitrogen-rich carbon nitride films were prepared by three different deposition methods on fused silica, stainless steel and silicon cantilever substrates. Their optical properties were studied by spectroscopic ellipsometry and UV spectrometry. Mechanical properties such as plastic and Vickers microhardness, Young's modulus, adhesion and film stress were also tested. The results were compared with the properties of films with lower nitrogen concentrations. |
