par Reniers, François 
;Hubin, Annick;Terryn, Herman ;Vereecken, Jean
Référence Surface and interface analysis, 21, 6-7, page (483-489)
Publication Publié, 1994-07
;Hubin, Annick;Terryn, Herman ;Vereecken, Jean Référence Surface and interface analysis, 21, 6-7, page (483-489)
Publication Publié, 1994-07
Article révisé par les pairs
| Résumé : | Factor analysis was applied to Auger sputter profiles of tungsten carbide and nitride samples. It is shown that very weak differences in the shapes of the metal peaks due to the presence of C and N can be isolated unambiguously by factor analysis. The different chemical states of carbon, nitrogen and tungsten were clearly identified. |
