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AES analysis of nitride layers on steel with target factor analysis

par Vandendael, Isabelle;Steenhaut, Oscar;Hubin, Annick;Vereecken, Jean ;Prince, P.;Reniers, François ;Segato, Tiriana
Référence Surface and interface analysis, 36, 8, page (1093-1097)
Publication Publié, 2004-08

Article révisé par les pairs

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Résumé :

Industrially nitrided steel samples are analysed with AES. The aim of this work is to optimize the quantification of nitrogen and to extract the chemical information hidden in the shape of the measured Auger peaks with Target Factor Analysis (TFA). To optimize the use of TFA, reference samples of pure components are necessary. These components are made in a laboratory reactor in which pure iron is nitrided. The resulting nitride layer is identified with X-Ray Diffraction (XRD). Afterwards their AES spectra are takers as input for the TFA of the industrial layers. In this paper, the preparation and the characterization of a γ′ -Fe4N standard is discussed, as well as the correction of the sensitivity factors used for the quantification of nitrogen. Finally, the application of TFA on art industrial nitride layer is discussed. Copyright © 2004 John Wiley & Sons, Ltd.