par Segers, Luc 
;Vernin, Philippe
Référence Key engineering materials, 206-213, I, page (7-10)
Publication Publié, 2001
;Vernin, Philippe Référence Key engineering materials, 206-213, I, page (7-10)
Publication Publié, 2001
Article révisé par les pairs
| Résumé : | This paper describes three laboratory scale installations based on high frequency plasma torches to produce and use nanometric size ceramic powders. Two were used to synthesise Si3N4, SiO2, and SiC from SiCl4 precursor gas and NH3, O2 and CH4 reactive gases. The last one was designed for high frequency plasma spraying. |
