par Mastrangeli, Massimo 
;Jacot-Descombes, Loic;Gullo, Maurizio R.;Brugger, Juergen
Référence MEMS 2014(26-30 January 2014: San Francisco (CA)), 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), IEEE, page (56-59)
Publication Publié, 2014
;Jacot-Descombes, Loic;Gullo, Maurizio R.;Brugger, JuergenRéférence MEMS 2014(26-30 January 2014: San Francisco (CA)), 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), IEEE, page (56-59)
Publication Publié, 2014
Publication dans des actes
| Résumé : | We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 µm SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues fromthe localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules’ rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMSfabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery. |
