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Improving Conformality in Selective Dip-Coating of Patterned Planar Substrates

par Mastrangeli, Massimo ;Ruythooren, Wouter;Baert, Kris;Van Hoof, Chris;Celis, J.-P
Référence Foundations of Nanoscience (FNANO07)(18-21 April 2007: Snowbird (UT)), 4th annual conference on Foundations of Nanoscience (FNANO07)
Publication Publié, 2007

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Résumé :

The capillarity-driven self-assembly of small chips onto planar carrier substrates heavily relies on the selective deposition of thin fluid films onpatterned binding sites. We found that the addition of a wetting sidewall, surrounding the entire site perimeter, enables the conformal dip-coating ofplanar sites and significantly improves the reproducibility of the coating process. We demonstrated the feasibility of this method with the dip-coating of square sites featuring methyl- and fluorine-based surface chemistries. Both experimental and simulative evidence of the advantages of the wetting boundary on film coating accuracy are presented.