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Determination of Young’s modulus of poly-SiGe micromachined structures using novel mechanical actuation test techniques

par Van Barel, Gregory;Modlinski, Robert;Mastrangeli, Massimo ;Witvrouw, Ann
Référence Eurosensors 2006(17-20 September 2006: Goteborg (SE)), Eurosensors 2006, page (282-283)
Publication Publié, 2006

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Résumé :

The mechanical properties of multilayered poly-SiGe are determined using cantilever structures and newly designed chariot wheel structures actuated by a surface profiler and a nanoindenter respectively. This set of structures allows the extraction of Young’s modulus, mean residual stress and gradient stress. Standard nanoindentation experiments on thin films are also used to determine the Young’s modulus for comparison.The test structures are surface micromachined using a process flow that minimizes the topography and the underetching effects.